Ellipsometry Standards are silicon wafers with a thermally grown silicon dioxide film which permit ellipsometers to be calibrated so they can operate in top condition. Each standard is certified by Gaertner for the ellipsometric parameters of DELTA and PSI and derived thickness and refractive index of the silicon dioxide layer on the silicon wafer. Measurement is performed at the popular HeNe laser wavelength of 6328 and 70° angle of incidence and is traceable to NIST.

the following thickness' are available

certification service
Gaertner will also certify user supplied samples for DELTA and PSI at wavelength of 6328 and 70° angle of incidence.   Since any material may change with time and usage, it is good practice to periodically re-certify standards.  Cost for recertification is $600.

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