ellipsometers
calibration standards

 

 

 

Ellipsometry Standards are silicon wafers with a thermally grown silicon dioxide film which permit ellipsometers to be calibrated so they can operate in top condition. Each standard is certified by Gaertner for the ellipsometric parameters of DELTA and PSI with derived thickness and refractive index of the silicon dioxide layer on the silicon wafer. Measurement is performed at the popular HeNe laser wavelength of 6328 and 70 angle of incidence and is traceable to NIST.

the following nominal thickness' are available

L118SW-20 20 Angstrom film on 100mm wafer $890
L118SW-100 100 Angstrom film on 100mm wafer $890
L118SW-600 600 Angstrom film on 100mm wafer $890
L118SW-1000 1000 Angstrom film on 100mm wafer $890
L118SW-1500 1500 Angstrom film on 100mm wafer $890
L118SW-2000 2000 Angstrom film on 100mm wafer $890


certification service

Gaertner can also certify most user supplied samples for DELTA and PSI at wavelength of 6328 and 70 angle of incidence with the certified values traceable to NIST.   Since any material is likely to change with usage and time, it is good practice to periodically re-certify standards.  Cost for recertification is $675.

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