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wafer handler L115WH description
The model L115WH Wafer Handler
permits unattended automatic measurement of up to 25 wafers from a cassette. The random
access indexer on the Wafer Handler is ultra clean with the mechanism fully contained
within the housing so there are no moving parts near the wafer. The motion of the arm is
precise, clean, gentle and extremely reliable. An optional Wafer Aligner (L115WHA)
can also be added to the Wafer Handler to orient the wafer on the ellipsometer stage.
features
- For use with models L115, L116,
L2W16, and L2W15 Ellipsometers
- Unattended automatic measurement of
up to 25 wafers
- User selection of Sequential or
Random Access mode
- Gentle, accurate handling of
4" to 300mm wafers
- Clean, non-contaminating,
highly reliable operation
wafer handler L115WH specifications
| Compatibility: |
Use with
Gaertner Waferskan Ellipsometers |
| Wafer
Sizes: |
4, 5, 6
inch standard; 8 inch and 300mm optional |
| Carrier
Accommodation: |
SEMI
std. H-Bar Cassette plus most other style carriers optional |
| Indexer
Load Capacity: |
Up to
35
lbs. |
| Operational
Modes: |
Sequential
between any wafer locations
(for example #3 through #15)
Random Access any wafer location
(for example #1, 4, 5, 11, 25) |
| Speed: |
Wafer
loading 10 seconds
Wafer measuring 4 seconds
Wafer unloading 10 seconds |
| Vacuum: |
User
supplied - 20 to 30 inches of Hg |
| Electrical
Power (VAC): |
110V,
115V, 220V, 230V, 240V |
| Dimensions: |
Height:
66 inches Width: 47 inches Depth: 26 inches
Net Weight: 250 lbs. |
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wafer
handler L115WH
