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variable angle manual
ellipsometer L117F300 description
The model L117F300
Variable Angle Manual Ellipsometer permits measurement of film thickness and index of
refraction to be made within minutes. The polarizer and analyzer drums are alternately
rotated by hand to positions which produce the minimum signal intensity to the gain
meter. These drum positions are then entered, via keyboard, into a PC to
convert to film thickness and film
refractive index.
The L117F300 is flexible
and can be upgraded as your needs change. It's new F type frame
structure is common to our short base ellipsometers permitting convenient factory upgrades
to the L116SF300 Automatic, the L115S300 WAFERSKAN, and L2W/L3W
Multiwavelength.
Reliable, upgradeable
and affordable at $25K the model L117F300 is an excellent nulling type ellipsometer. The
L117F300
comes standard with an autoreflecting/viewing scope, tiltable pedestal table and manual entry
LGEMP PC program described below.
software description
LGEMP
Windows software is versatile and can measure single layer films such
as oxides, nitrides and photoresists as well the top layer on a known 1, 2,
or 3 layer stack such as poly on oxide and oxide on poly on oxide.
Model L117F300 with Linear Rotary Stage Close-up
optional accessories
Linear Rotary Stage L116LRS (see photo
above)
This linear rotary stage is moved by hand in a linear and 360º rotary
motion so that different areas on the sample can be conveniently measured.
The 8" sample table can accept up to 300mm wafers and has 150 mm left to right cross travel and can be
scale read to 1 mm. The L116LRS accepts sample thickness up to 1/2 inch
and has provision for vacuum and tilt up to 1 degree. $4K
XY Linear Rotary Stage L116LRSY
This stage is same as the L116LRS except ± 1" micrometer front
to back travel in Y is added. The added Y coordinate motion facilities
measurement of a XY rectangular pattern. $5K
Stage Modification L116LRS10
Same as L116LRS but with modification for samples with Philips style hub. $5K
Microspot Optics L116MS
Consist of both a projector optic that reduces the normal 1mm laser
beam diameter down to 15 microns and a receiver optic. At 70 degrees
incidence, 15 X 52 micron sample areas can be measured. At 50 degrees
incidence the measured area is 15 X 35 microns. Microspot Optics are
factory installable and non-re-moveable. $2K
Video Monitor L115VM
Permits monitoring a wafer pattern on a 9" CRT screen. $5K
L117F300 can be equipped with the following laser
options:
LASER SUBSTITUTION
LS405 Substitutes 405 nm Blue
laser diode in place of 633 nm HeNe Gas Laser $13K
LS544 Substitutes 544 nm Green HeNe Gas laser in
place of 633 nm HeNe Gas Laser $4K
LS830 Substitutes 830 nm laser diode in place of
633 nm HeNe Gas Laser $9K
ADD ADDITIONAL LASER FOR A 2
WAVELENGTH ELLIPSOMETER
L2W405 Adds 405 nm Blue Laser Diode
to 633 nm ellipsometer $21K
L2W544 Adds 544 nm Green HeNe Gas Laser to 633 nm
ellipsometer $15K
L2W830 Adds 830 nm laser diode to 633 nm
ellipsometer $18K
ADD TWO ADDITIONAL LASERS FOR A 3 WAVELENGTH
ELLIPSOMETER
L3W405.544 Adds 405 Laser Diode and 544
Green Gas Laser to 633 nm ellipsometer $26K
L3W405.830 Adds 405 Laser Diode and 830nm laser diode to
633 nm ellipsometer $29K
L3W544.830 Adds 544 Green Gas Laser and 830nm laser diode
to 633 nm ellipsometer $23K
variable angle manual ellipsometer
L117F300
specifications
| Alignment: |
Built-in
axis of rotation of incident arms is in the sample plane. Incidence
angles are easily set
with no need for alignment prisms. The robust frame maintains alignment for precise
and reproducible results. |
| Method
of Measurement: |
Nulling
type ellipsometer using high quality calcite prisms |
| Detector: |
Solid
State |
| Incidence
Angle: |
30°,
45°, 50°, 55°, 60°, 65°, 70°, 75°, 80°, 90° (prealigned and easily
set via detents) |
| Light
Source: |
HeNe
6328 Laser gives less than 1 mW output on sample |
| Beam
Diameter: |
1mm
diameter ( 1 x 3mm on wafer @ 70°) |
| Microspot
(Optional): |
15
micron diameter (15 x 52 micron on wafer @ 70°) |
| Sample
(Wafer) Size: |
Pedestal 8
inch table with provision for vacuum is freely positioned by hand. 1/2
inch height adjustment together with tilt corrects for sample out of
flatness of up to 1º in both X and Y planes. Docking pedestal can be
separated to accommodate 2 inch thick samples or special fixturing. Standard frame can accommodate a
12 inch
sample up to 1/2 inch thick. |
| Polarizer/Analyzer
Drums: |
360°
graduated at 1° intervals with 10 part vernier reading to 0.1° |
| Data
Conversion: |
Manual
entry Windows LGEMP 4 layer software included |
| Film
Thickness Range: |
0-60,000
Angstroms |
| Accuracy: |
± 3 to
10 Angstroms in thickness, ± 0.01 in index over most of the measurement range |
| Power: |
115V,
110V, 220V, 230V, 240V |
| Dimensions: |
Height:
14", Width: 27", Depth: 13 1/2" |
| Weight: |
70 lbs.
net - Shipping weight 85 lbs. |
| CE
Compliance: |
F series Ellipsometers have improved electronic design to comply with
European safety directives and carry the CE mark. |
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variable
angle manual ellipsometer L117F
