gaertner ellipsometer measurement program LGEMP description
LGEMP Windows  software is versatile and can measure single layer films such as oxides, nitrides and photoresists as well the top layer on a known 1, 2, or 3 layer stack such as poly on oxide and oxide on poly on oxide. The LGEMP 4 layer absorbing film program replaces our older standard and optional programs such as LGC6A, LGC8A, LGC8A4, LGC9A3, LGC10A, LSC11A and LSC12A. The program requires a L116A, B, C, D type ellipsometer connected to an PC computer running Windows VISTA/XP/2000 software. The LGEMP program with Windows will not communicate with the older full length ISA interface card. The L116UG-WIN upgrade consisting of the new 1/2 length PCI card, cable and LGEMP is required for running under Windows VISTA/XP/2000.   The LGEMP can be used with a manual nulling ellipsometer such as the model L117, and it is also available for our 2 and 3 wavelength ellipsometers models.

features

Same quick data acquisition as our DOS-based ellipsometry software, but with the simplicity and control gained from being in a Windows environment.

Capability to handle up to four-layer films where each layer can be either transparent or absorbing in the wavelength measured at. The thickness’ of the top layer can be measured on a substrate, 1, 2 or 3 known sublayer films.

Provision to change the angle of incidence, polarizer drum angle, ambient N (refractive index of the media when the film is immersed in a liquid); and provision to change the wavelength of the light source for multiwavelength ellipsometers.

"File Handler" which permits the saving and quick retrieval of frequently used measurement setup parameters. In addition, up to four of these user-defined setup files can be assigned to one step "press-and-go" shortcut buttons for even faster access of different measurement setups.

Selective display and storage of measured data. Measurements stored in the program's document area can be saved as a text file. The text file can later be opened and edited by any text-editing program such as Microsoft Notebook or Excel.

Capability to permit the entry of previously measured "psi" and "delta" (the raw ellipsometric data) for calculation of thickness using different setups or modeling schemes. Price $975.

back to software and upgrades | back to ellipsometers