ellipsometers
lasers for multiwavelength ellipsometers 

 

 

 

 

Model LSE-WS with 2 Wave option L2W544 shown above

multiwavelength ellipsometers description
Multiwavelength Laser Ellipsometers give the user greater versatility in thickness and refractive index measurement of thin transparent and semi-transparent films. Laser light sources have ample light intensity for increased measurement accuracy of absorbing and rough scattering films. Laser sources have the added advantage of being spectrally precise, stable and long lasting. Their use permits optimum instrument design with optics, detectors and other components so that measurements can be made highly accurate. Separate laser sources offer backup reliability important to continuous operation and they are a excellent alternative to overly complicated less precise spectroscopic ellipsometers..

features

  • Measure thick films without thickness period ambiguity
  • Variable wavelength useful for difficult to measure films.
  • Get refractive index in near period regions
  • Trouble-free, no moving parts advance StokesMeterô measurement head.
  • Measures complete state of polarization useful for rough,scattering samples.
  • Measure photoresist index closer to exposure wavelengths
  • Get dispersion with two or three values of refractive index
  • Analyze difficult to measure films like Poly, Plasma Nitride and Silicon on Sapphire
  • Improves modeling results using more measured data for complicated structures 
  • Simpler and less complex than spectroscopic ellipsometers.

 

 OPTIONAL LASERS  FOR STOKES ELLIPSOMETERS:

       405 nm Laser Diode
       544 nm HeNe Gas Laser
       633 nm HeNe Gas Laser standard
       830 nm Laser Diode

 SINGLE LASER SUBSTITUTION Options

LS405    Substitutes 405 nm  Blue laser diode in place of standard 633 nm HeNe Gas Laser  $13K
LS544    Substitutes 544 nm Green HeNe Gas laser in place of 633 nm HeNe Gas Laser  $4K
LS830    Substitutes 830 nm laser diode in place of 633 nm HeNe Gas Laser $9K

ADD ADDITIONAL LASER FOR A 2 WAVELENGTH ELLIPSOMETER 

L2W405    Adds 405 nm Blue Laser Diode to 633 nm ellipsometer $21K
L2W544    Adds 544 nm Green HeNe Gas Laser to 633 nm ellipsometer $15K
L2W830    Adds 830 nm laser diode to 633 nm ellipsometer  $18K 


ADD TWO ADDITIONAL LASERS FOR A 3 WAVELENGTH ELLIPSOMETER  

L3W405.544   Adds 405 Laser Diode and 544 Green Gas Laser to 633 nm ellipsometer $26K
L3W405.830   Adds 405 Laser Diode and 830nm laser diode to 633 nm ellipsometer $29K            
L3W544.830   Adds 544 Green Gas Laser and 830nm laser diode to 633 nm ellipsometer $23K
 

Software for multiwavelength laser ellipsometers

LGEMP 4 Layer Absorbing Program for Windows and LMOD 4 Layer Simultaneous Modeling Program for Windows are included with Multiwave Ellipsometers.

 

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