ellipsometry and polarized
R.M.A. Azzam and N.M. Bashara, 1977, softcover, 530 pages.
The authors present a comprehensive study of the different mathematical
representations of polarized light and how such light is processed by
optical systems, especially ellipsometers. Electro-magnetic theory is used
to relate ellipsometric measurements to surface properties. Experimental
techniques and apparatus are described and many interesting applications of
ellipsometry to surface and thin film phenomena are reviewed. This text is a
classic publication in the field. Check availablity.
selected papers on ellipsometry
R M Azzam, 1991 softcover, 736 pages.
A SPIE Milestone reprint collection of 98 outstanding papers from the world
literature on ellipsometry. The papers are selected by a world authority
with a deep knowledge of the subject matter. Check availablity.
manual on ellipsometry
R.J. Archer, 1968, 36 pages.
A treatment of the principals of nulling type ellipsometry, instrument
calibration and measuring procedures and the interpretation of measurements
with examples. Based on the classic, nulling type, Gaertner model L119
Manual Research Ellipsometer.
tables (73 pages) L117T
Give single transparent film thickness from 0 to 3500 Angstroms and the
corresponding DELTA and PSI values. Tables are incremented in 0.05
refractive index steps from 1.30 to 3.60 for 30°, 50°, and 70° incidence
angle for a silicon substrate and 6328 wavelength. A table of thickness period
multiples vs. index is also included.