||LGEMP - Gaertner Ellipsometer Measurement
LGEMP Windows software is versatile and can
measure single layer films such as oxides, nitrides and photoresists
as well the top layer on a known 1, 2, or 3 layer stack such as poly
on oxide and oxide on poly on oxide. The LGEMP program requires
an L116, A, B, C, D or S type ellipsometer running Windows software.
It can also be used with our
2 and 3 wavelength ellipsometer models.
||LMOD - Four Layer Modeling Program
Our LMOD Windows modeling software permits the
simultaneous computation of film thickness, index and adsorption
values in a single, two, three or four layer film stack. The Windows software
is flexible permitting any of the 14 substrate or film parameters to
be solved for or fixed using computational routines developed by NIST.
USB upgrade packages
Older ellipsometer models interfaced to old computers using interface cards can be upgraded
to a USB interface running LGEMP software on the latest Windows
WAFERSKAN models can be upgraded with USB interfaces for
2D/3D Color Maps on the latest WINDOWS computers . The ellipsometer must be in good mechanical working condition
as software alone will not correct hardware issues.
L116 series ellipsometer upgrades
L116UG – USB
Upgrade Kit consists of a USB interface with cable and
Windows LGEMP software. Please
connector on your ellipsometer when placing an order.
LSE series ellipsometer upgrades
LSE-UG – USB
Converts a PCI card interfaced LSE ellipsometer to a USB computer interface. Upgrade Kit consists of a USB interface with cable and
latest Windows LGEMP software.
L115 series ellipsometer upgrades
L115UG - USB
The Upgrade Kit consists of two USB interfaces one for the ellipsometer
and a second for the the stage controller. The upgrade kit includes cables, and
the latest 2D/3D Color Mapping software for Windows. A CC1.2, MM3000
or ESP300 Controller is
required for use with the Upgrade. The old model TL17
prior to 1982) cannot be controlled by the PC.