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software upgrades
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LGEMP - Gaertner Ellipsometer Measurement
Program |
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LGEMP Windows software is versatile and can
measure single layer films such as oxides, nitrides and photoresists
as well the top layer on a known 1, 2, or 3 layer stack such as poly
on oxide and oxide on poly on oxide. The LGEMP program requires
an L116, A, B, C, D or S type ellipsometer connected to an IBM PC
computer running Windows VISTA/XP/2000 software. Also, it can be used with our
2 and 3 wavelength ellipsometer models. Price $975.
more information
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LMOD - Four Layer Modeling Program |
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Our new LMOD Windows modeling software permits the
simultaneous computation of film thickness, index and adsorption
values in a single, two, three or four layer film stack. The Windows
VISTA/XP/2000 software
is flexible permitting any of the 14 substrate or film parameters to
be solved for or fixed using computational routines developed by NIST.
Price $975.
more information
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upgrade packages
Older ellipsometer models such as the L116 type with Hewlett Packard
computers can be upgraded to IBM or compatible computers with WINDOWS
VISTA/XP/2000 software. WAFERSKAN models L115A and L115B with Hewlett
Packard computers can be upgraded to IBM PC or compatible computers for
2D/3D Color Maps. Click on the following link to identify your connector
type.
L116 series ellipsometer upgrades
L116UG – WIN
Upgrade Kit consists of a PCI interface card, interface cable, and
Windows VISTA/XP/2000 LGEMP software. The PCI interface card is a standard half
size card that is inserted in any available PCI interface slot in your IBM computer or compatible.
An interface cable connects the interface card to the ellipsometer. The
L116 - WIN Upgrade Kit price is $2,995.
L115 series ellipsometer upgrades
  
L115UG - WIN
The Upgrade Kit consists of two PCI interface cards, interface cables, and
2D/3D Color Mapping Windows VISTA/XP/2000 software. A CC1.2 or MM3000 Controller is
required for use with the IBM PC or compatible. The old model TL17
Controller (supplied
prior to 1982) cannot be controlled by the PC. The L115UG - WIN Upgrade
Kit price is $3,995.
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