Ellipsometer Calibration Standards NIST Traceable
Ellipsometry Standards are silicon wafers with a thermally grown silicon dioxide film which permit ellipsometers to be precisely calibrated. Each standard is certified by Gaertner for the ellipsometric parameters of DELTA and PSI with derived thickness and refractive index of the silicon dioxide layer on the silicon wafer. Measurement is performed at the popular (same as NIST) HeNe laser wavelength of 6328 and 70° angle of incidence and is traceable to NIST primary standards.
The following nominal thicknesses are available
L118N-20 - 20 Angstrom film on 100mm wafer
L118N-100 - 100 Angstrom film on 100mm wafer
L118N-550 - 550 Angstrom film on 100mm wafer
L118N-1000 - 1000 Angstrom film on 100mm wafer
L118N-1500 - 1500 Angstrom film on 100mm wafer
L118N-2000 - 2000 Angstrom film on 100mm wafer
$1225 per standard
Above wafers are also available with only the Gaertner label showing the measured values of film thickness, index, PSI, DELTA but without NIST traceability documentation at a reduced cost of $595. each i.e. L118G-20, L118G-100, L118G-550,L118G-1000, L118G-1500, L118G-2000.
Certification Service - NIST traceable
Gaertner will also recertify your wafers from VLSI, Rudolph, and Filmetrics for DELTA and PSI with derived thickness and refractive index performed at the popular (same as NIST) wavelength of 6328 and 70° angle of incidence with the certified values traceable to NIST. Since any material is likely to change with usage and time, it is good practice to periodically re-certify standards and to maintain regulatory compliance.
$895 for recertification