Software and Upgrades for Gaertner Ellipsometers

Gaertner Ellipsometer Measurement Program LGEMP

LGEMP Windows 10/7/VISTA/XP software is versatile and can calculate single layer films such as oxides, nitrides and photoresists as well the top layer on a known 1, 2, or 3 layer stack such as poly on oxide and oxide on poly on oxide. The LGEMP 4 layer absorbing film program replaces our older standard and optional programs.

Features

Capability to handle up to four-layer films where each layer can be either transparent or absorbing at the measured wavelength. Any two of the 14 variables can be selected for calculation in a 4-layer film stack.  However the top layer thickness is the most common and successful measurement. A "File Handler" enables saving and quick retrieval of frequently used measurement setup parameters. Four user-defined setup files can be assigned to one step "press-and-go" shortcut buttons for  fast access of different measurement setups.

Note: L116A, B, C, D older type ellipsometers with the older 13.25 inch ISA interface card will require the L116UG-USB upgrade consisting of a new USB interface and LGEMP software as WINDOWS will not communicate with the old ISA card.   The LGEMP can be used with a manual nulling ellipsometer model L117, and it is also available for our 2 and 3 wavelength ellipsometers models.

The Enlarged PSI-Delta  Map within the LGEMP program permits theoretical "what if" type simulation of your Thin Film Model  providing a deeper understanding of the film modeling.  The top layer film Thickness T1(pink line), Refractive indexNf1(red line), Absorption Kf1(brown line),  Y(yellow line),  D(green line), with moveable sliders on the left side quickly show the effects of varying the model parameters on the film refractive index resolution and measurability.  The aqua color lines are lines of constant film refractive index Nf1.  The white lines are regions of Autofix of Nf1 where the index is not easily resolved in this region.

The program permits changing the angle of incidence, polarizer drum angle, ambient N (refractive index of the media when the film is immersed in a liquid); and the wavelength of the light source for multiwavelength ellipsometers. A "File Handler" enables saving and quick retrieval of frequently used measurement setup parameters. Four user-defined setup files can be assigned to one step "press-and-go" shortcut buttons for fast access of different measurement setups.

Selective display and storage of measured data. Measurements stored in the program's document area can be saved as a text file. The text file can later be opened and edited by any text-editing program such as Microsoft Notebook or Excel. Capability to permit the entry of previously measured "psi" and "delta" (the raw ellipsometric data) for calculation of thickness using different setups or modeling schemes.  Price $975

Our LMOD modeling software for Windows 10/7/VISTA/XP permits the simultaneous computation of film thickness, index and adsorption values in a single, two, three or four layer film stack when multiple measurements on the stack are made. 

The LMOD program permits up to 3 wavelengths and 8 incidence angles to be used in the simultaneous modeling since it is intended for use with any of our 1, 2 and 3 wavelength ellipsometers. When used with our single wavelength variable angle ellipsometer, measurements are made at multiple angles of incidence so that the number of measured DEL and PSI parameters exceeds the number of unknown values thus over-determining the system. The number of different measured PSI, DELTA values must equal or exceed the number of unkowns to be determined.  

An important advantage to angle vs. wavelength variation is that thickness, index, and absorption values remain constant for angle changes unlike wavelength variation that changes the film index and absorption values. The software is flexible permitting any of the 2 or 3 out of 14 substrate or film parameters to be determined using computational routines developed by NIST. 

The LMOD program permits repeat modeling from sets of measured data so you can iterate the T, N, and K values of different layers in a stack until your results are optimized. The mean variation from the ideal target DEL and PSI values are calculated. The structural setups, material parameters, and measured data can be  stored in files for recall into the software or for later use.

Input of measured data into the modeling program is performed automatically but can also be done manually by simply entering the DEL and PSI values. The software also performs the forward calculation of the DEL and PSI values from a layered model.  The LMOD program provides solutions for many challenging samples which otherwise would remain unsolved. Price $975.

For older ellipsometer models  L116A, B, C, D, E, F type, the program also requires the L116UG-USB upgrade of a new USB interface. The LMOD  Windows program will not communicate with the old full length ISA interface card used on older computers.

USB upgrade packages

Older ellipsometer models interfaced to old computers using interface cards can be upgraded to a USB interface  running LGEMP software on the latest Windows computers. WAFERSKAN models can be upgraded with USB interfaces for 2D/3D Color Maps on the latest WINDOWS computers. The ellipsometer must be in good mechanical working condition as software alone will not correct hardware issues.

L116 series ellipsometer upgrades

L116UG – USB
Upgrade Kit consists of a USB interface with cable and Windows  LGEMP software. Please identify the cable connector on your ellipsometer when placing an order.  

LSE series ellipsometer upgrades
Converts a PCI card  interfaced LSE ellipsometer to a USB computer interface. LSE-UG – USB Upgrade Kit consists of a USB interface with cable and latest Windows  LGEMP software. The USB upgrade replaces the old A/D card inside the ellipsometer as well as the PCI card inside your PC.

L115 USB Upgrades

L115UG - USB
The Upgrade Kit consists of two USB interfaces one for the ellipsometer and a second for the the stage controller. The upgrade kit includes cables, and the latest 2D/3D Color Mapping software for Windows. A CC1.2, MM3000 or ESP300 Controller is required for use with the Upgrade. The old model TL17 Controller (supplied prior to 1982) cannot be controlled by the PC.